Inventor
OKUDA SEIICHIRO
JP10 patents
Patents
10 patentsUS5762709AJun 9, 1998
Substrate spin coating apparatus
DAINIPPON SCREEN MFG76 citations96
US6550988B2Apr 22, 2003
Substrate processing apparatus
DAINIPPON SCREEN MFG64 citations95
US7479205B2Jan 20, 2009
Substrate processing apparatus
DAINIPPON SCREEN MFG23 citations92
US7418970B2Sep 2, 2008
Substrate processing apparatus for drying substrate
DAINIPPON SCREEN MFG26 citations92
US6951221B2Oct 4, 2005
Substrate processing apparatus
DAINIPPON SCREEN MFG22 citations92
US6805769B2Oct 19, 2004
Substrate processing apparatus
DAINIPPON SCREEN MFG48 citations92
US6000862ADec 14, 1999
Substrate developing method and apparatus
DAINIPPON SCREEN MFG31 citations92
US5788773AAug 4, 1998
Substrate spin treating method and apparatus
DAINIPPON SCREEN MFG29 citations92
US7267130B2Sep 11, 2007
Substrate processing apparatus
DAINIPPON SCREEN MFG7 citations73
US7428907B2Sep 30, 2008
Substrate processing apparatus
DAINIPPON SCREEN MFG1 citations51