Inventor
VOORMA HARM-JAN
NL11 patents
⚠️ This page may combine multiple inventors who share the name “VOORMA HARM-JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7113261B2Sep 26, 2006
Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV8 citations73
US7145640B2Dec 5, 2006
Lithographic apparatus, device manufacturing method and variable attenuator
ASML NETHERLANDS BV8 citations72
US7098994B2Aug 29, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV7 citations69
US7875863B2Jan 25, 2011
Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method
ASML NETHERLANDS BV6 citations62
US7023524B2Apr 4, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations62
US7767989B2Aug 3, 2010
Ex-situ removal of deposition on an optical element
ASML NETHERLANDS BV1 citations60
US10222702B2Mar 5, 2019
Radiation source
ASML NETHERLANDS BV1 citations58
US7470916B2Dec 30, 2008
Lithographic apparatus, device manufacturing method and radiation collector
ASML NETHERLANDS BV2 citations57