Inventor
PARK MOO-YONG
KR8 patents
⚠️ This page may combine multiple inventors who share the name “PARK MOO-YONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS7488235B2Feb 10, 2009
Polishing apparatus and related polishing methods
SAMSUNG ELECTRONICS CO LTD17 citations90
US7066785B2Jun 27, 2006
Polishing apparatus and related polishing methods
SAMSUNG ELECTRONICS CO LTD21 citations90
US7166019B2Jan 23, 2007
Flexible membrane for a polishing head and chemical mechanical polishing (CMP) apparatus having the same
SAMSUNG ELECTRONICS CO LTD14 citations82
US7559824B2Jul 14, 2009
Chemical mechanical polishing devices, pad conditioner assembly and polishing pad conditioning method thereof
SAMSUNG ELECTRONICS CO LTD10 citations79
US7364497B2Apr 29, 2008
Polish pad and chemical mechanical polishing apparatus comprising the same
SAMSUNG ELECTRONICS CO LTD14 citations79