Inventor
KIM TAI-HYOUNG
KR2 patents
Patents
2 patentsUS7365021B2Apr 29, 2008
Methods of fabricating a semiconductor device using an organic compound and fluoride-based buffered solution
SAMSUNG ELECTRONICS CO LTD10 citations80
US7559824B2Jul 14, 2009
Chemical mechanical polishing devices, pad conditioner assembly and polishing pad conditioning method thereof
SAMSUNG ELECTRONICS CO LTD10 citations79