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Inventor
KIM CHOON-GOANG
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “KIM CHOON-GOANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
1 patent
US7559824B2
Jul 14, 2009
Chemical mechanical polishing devices, pad conditioner assembly and polishing pad conditioning method thereof
SAMSUNG ELECTRONICS CO LTD
10 citations
79
KIM CHOON-GOANG
1 patent
US8858302B2
Oct 14, 2014
Retainer rings of chemical mechanical polishing apparatus and methods of manufacturing the same
KIM CHOON-GOANG
8 citations
71