Inventor

YIN YAOBO

US5 patents

⚠️ This page may combine multiple inventors who share the name “YIN YAOBO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US7942973B2May 17, 2011

Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses

LAM RES CORP9 citations83

US7578889B2Aug 25, 2009

Methodology for cleaning of surface metal contamination from electrode assemblies

LAM RES CORP9 citations82

YIN YAOBO

2 patents

US8327861B2Dec 11, 2012

Megasonic precision cleaning of semiconductor process equipment components and parts

YIN YAOBO15 citations77

US8607806B2Dec 17, 2013

Megasonic precision cleaning of semiconductor process equipment components and parts

YIN YAOBO1 citations45

SHIH HONG

1 patent

US8215321B2Jul 10, 2012

Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses

SHIH HONG3 citations61