Inventor
JIANG LINDA
US3 patents
Patents
3 patentsUS6277203B1Aug 21, 2001
Method and apparatus for cleaning low K dielectric and metal wafer surfaces
LAM RES CORP43 citations90
US6896586B2May 24, 2005
Method and apparatus for heating polishing pad
LAM RES CORP26 citations89
US7578889B2Aug 25, 2009
Methodology for cleaning of surface metal contamination from electrode assemblies
LAM RES CORP9 citations82