Inventor
RERICHA WILLIAM T
US23 patents
⚠️ This page may combine multiple inventors who share the name “RERICHA WILLIAM T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
15 patentsUS7115525B2Oct 3, 2006
Method for integrated circuit fabrication using pitch multiplication
MICRON TECHNOLOGY INC517 citations99
US7253118B2Aug 7, 2007
Pitch reduced patterns relative to photolithography features
MICRON TECHNOLOGY INC161 citations98
US7687408B2Mar 30, 2010
Method for integrated circuit fabrication using pitch multiplication
MICRON TECHNOLOGY INC42 citations96
US7651951B2Jan 26, 2010
Pitch reduced patterns relative to photolithography features
MICRON TECHNOLOGY INC46 citations96
US7547640B2Jun 16, 2009
Method for integrated circuit fabrication using pitch multiplication
MICRON TECHNOLOGY INC49 citations96
US7455956B2Nov 25, 2008
Method to align mask patterns
MICRON TECHNOLOGY INC41 citations96
US7629693B2Dec 8, 2009
Method for integrated circuit fabrication using pitch multiplication
MICRON TECHNOLOGY INC20 citations93
US7655387B2Feb 2, 2010
Method to align mask patterns
MICRON TECHNOLOGY INC19 citations92
US7435536B2Oct 14, 2008
Method to align mask patterns
MICRON TECHNOLOGY INC29 citations92
US7038762B2May 2, 2006
Method and apparatus for irradiating a microlithographic substrate
MICRON TECHNOLOGY INC21 citations92
US6784975B2Aug 31, 2004
Method and apparatus for irradiating a microlithographic substrate
MICRON TECHNOLOGY INC28 citations92
US5925410AJul 20, 1999
Vibration-enhanced spin-on film techniques for semiconductor device processing
MICRON TECHNOLOGY INC47 citations92
US8674512B2Mar 18, 2014
Method to align mask patterns
MICRON TECHNOLOGY INC5 citations84
US7771917B2Aug 10, 2010
Methods of making templates for use in imprint lithography
MICRON TECHNOLOGY INC3 citations63
US7298453B2Nov 20, 2007
Method and apparatus for irradiating a microlithographic substrate
MICRON TECHNOLOGY INC4 citations62
TRAN LUAN
3 patentsUS8598632B2Dec 3, 2013
Integrated circuit having pitch reduced patterns relative to photoithography features
TRAN LUAN10 citations92
US8207576B2Jun 26, 2012
Pitch reduced patterns relative to photolithography features
TRAN LUAN18 citations92
US8119535B2Feb 21, 2012
Pitch reduced patterns relative to photolithography features
TRAN LUAN8 citations83