Inventor

CHEN CHUN-KUNG

TW2 patents

Patents

2 patents

US7501226B2Mar 10, 2009

Immersion lithography system with wafer sealing mechanisms

TAIWAN SEMICONDUCTOR MFG11 citations80

US7723014B2May 25, 2010

System and method for photolithography in semiconductor manufacturing

TAIWAN SEMICONDUCTOR MFG0 citations47