Inventor
GALLATIN GREGG M
US24 patents
⚠️ This page may combine multiple inventors who share the name “GALLATIN GREGG M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
13 patentsUS7512927B2Mar 31, 2009
Printability verification by progressive modeling accuracy
IBM77 citations98
US7010776B2Mar 7, 2006
Extending the range of lithographic simulation integrals
IBM73 citations98
US7079223B2Jul 18, 2006
Fast model-based optical proximity correction
IBM86 citations97
US7131104B2Oct 31, 2006
Fast and accurate optical proximity correction engine for incorporating long range flare effects
IBM16 citations84
US7055126B2May 30, 2006
Renesting interaction map into design for efficient long range calculations
IBM11 citations84
US7774737B2Aug 10, 2010
Performance in model-based OPC engine utilizing efficient polygon pinning method
IBM7 citations74
US7343271B2Mar 11, 2008
Incorporation of a phase map into fast model-based optical proximity correction simulation kernels to account for near and mid-range flare
IBM7 citations74
US7840057B2Nov 23, 2010
Simultaneous computation of multiple points on one or multiple cut lines
IBM3 citations63
US7761839B2Jul 20, 2010
Performance in model-based OPC engine utilizing efficient polygon pinning method
IBM2 citations63
US7366342B2Apr 29, 2008
Simultaneous computation of multiple points on one or multiple cut lines
IBM4 citations63
US7127699B2Oct 24, 2006
Method for optimizing a number of kernels used in a sum of coherent sources for optical proximity correction in an optical microlithography process
IBM3 citations63
US7434196B2Oct 7, 2008
Renesting interaction map into design for efficient long range calculations
IBM0 citations52
US7287239B2Oct 23, 2007
Performance in model-based OPC engine utilizing efficient polygon pinning method
IBM0 citations52
ZYGO CORP
3 patentsUS7324214B2Jan 29, 2008
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP102 citations96
US7948636B2May 24, 2011
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP17 citations92
US7684049B2Mar 23, 2010
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP18 citations92
ASML HOLDING NV
2 patentsUS6822728B2Nov 23, 2004
Illumination system with spatially controllable partial coherence compensation for line width variances in a photolithographic system
ASML HOLDING NV15 citations92
US7092070B2Aug 15, 2006
Illumination system with spatially controllable partial coherence compensating for line width variances
ASML HOLDING NV6 citations74