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Inventor
KALIA SURAJ
US
2 patents
⚠️ This page may combine multiple inventors who share the name “KALIA SURAJ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
1 patent
US7886910B2
Feb 15, 2011
Front opening wafer carrier with path to ground effectuated by door
ENTEGRIS INC
7 citations
80
BORES GREGORY
1 patent
US8276759B2
Oct 2, 2012
Front opening wafer carrier with path to ground effectuated by door
BORES GREGORY
4 citations
53