Inventor
TIEBEN ANTHONY MATHIUS
US10 patents
⚠️ This page may combine multiple inventors who share the name “TIEBEN ANTHONY MATHIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
6 patentsUS7328727B2Feb 12, 2008
Substrate container with fluid-sealing flow passageway
ENTEGRIS INC32 citations91
US7607543B2Oct 27, 2009
Reticle pod with isolation system
ENTEGRIS INC43 citations90
US7528936B2May 5, 2009
Substrate container with pressure equalization
ENTEGRIS INC27 citations90
US7578407B2Aug 25, 2009
Wafer container with sealable door
ENTEGRIS INC16 citations82
US7886910B2Feb 15, 2011
Front opening wafer carrier with path to ground effectuated by door
ENTEGRIS INC7 citations80
US10784135B2Sep 22, 2020
Substrate container with improved substrate retainer and door latch assist mechanism
ENTEGRIS INC2 citations69