Inventor

MACCRIMMON RUAIRIDH

US8 patents

⚠️ This page may combine multiple inventors who share the name “MACCRIMMON RUAIRIDH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEL EPION INC

2 patents

US7564024B2Jul 21, 2009

Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces

TEL EPION INC11 citations81

US9324567B2Apr 26, 2016

Gas cluster ion beam etching process for etching Si-containing, Ge-containing, and metal-containing materials

TEL EPION INC1 citations51

MACCRIMMON RUAIRIDH

2 patents

US8293126B2Oct 23, 2012

Method and system for multi-pass correction of substrate defects

MACCRIMMON RUAIRIDH6 citations68

US8298432B2Oct 30, 2012

Method and system for adjusting beam dimension for high-gradient location specific processing

MACCRIMMON RUAIRIDH1 citations47

SHAO YAN

2 patents

US8513138B2Aug 20, 2013

Gas cluster ion beam etching process for Si-containing and Ge-containing materials

SHAO YAN3 citations57

US8557710B2Oct 15, 2013

Gas cluster ion beam etching process for metal-containing materials

SHAO YAN0 citations46

TABAT MARTIN D

1 patent

US8512586B2Aug 20, 2013

Gas cluster ion beam etching process for achieving target etch process metrics for multiple materials

TABAT MARTIN D5 citations71

IDEX HEALTH AND SCIENCE LLC

1 patent

US12018672B2Jun 25, 2024

Precision volumetric pump with a bellows hermetic seal

IDEX HEALTH AND SCIENCE LLC0 citations37