Inventor

HOFMEESTER NICOLAUS J

US6 patents

⚠️ This page may combine multiple inventors who share the name “HOFMEESTER NICOLAUS J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEL EPION INC

4 patents

US7564024B2Jul 21, 2009

Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces

TEL EPION INC11 citations81

US7550748B2Jun 23, 2009

Apparatus and methods for systematic non-uniformity correction using a gas cluster ion beam

TEL EPION INC8 citations78

US7550749B2Jun 23, 2009

Methods and processing systems for using a gas cluster ion beam to offset systematic non-uniformities in workpieces processed in a process tool

TEL EPION INC19 citations78

US7917241B2Mar 29, 2011

Method and system for increasing throughput during location specific processing of a plurality of substrates

TEL EPION INC4 citations60

MACCRIMMON RUAIRIDH

2 patents

US8293126B2Oct 23, 2012

Method and system for multi-pass correction of substrate defects

MACCRIMMON RUAIRIDH6 citations68

US8298432B2Oct 30, 2012

Method and system for adjusting beam dimension for high-gradient location specific processing

MACCRIMMON RUAIRIDH1 citations47