Inventor
CALIENDO STEVEN P
US11 patents
⚠️ This page may combine multiple inventors who share the name “CALIENDO STEVEN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL EPION INC
5 patentsUS7564024B2Jul 21, 2009
Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces
TEL EPION INC11 citations81
US7917241B2Mar 29, 2011
Method and system for increasing throughput during location specific processing of a plurality of substrates
TEL EPION INC4 citations60
US9502209B2Nov 22, 2016
Multi-step location specific process for substrate edge profile correction for GCIB system
TEL EPION INC1 citations47
US9105443B2Aug 11, 2015
Multi-step location specific process for substrate edge profile correction for GCIB system
TEL EPION INC0 citations47
US10256095B2Apr 9, 2019
Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system
TEL EPION INC0 citations39
TOKYO ELECTRON LTD
4 patentsUS6455414B1Sep 24, 2002
Method for improving the adhesion of sputtered copper films to CVD transition metal based underlayers
TOKYO ELECTRON LTD65 citations93
US7521089B2Apr 21, 2009
Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers
TOKYO ELECTRON LTD48 citations92
US6482477B1Nov 19, 2002
Method for pretreating dielectric layers to enhance the adhesion of CVD metal layers thereto
TOKYO ELECTRON LTD20 citations91
US6562708B1May 13, 2003
Method for incorporating silicon into CVD metal films
TOKYO ELECTRON LTD7 citations73