Inventor
SVIZHER ALEXANDER
IL18 patents
⚠️ This page may combine multiple inventors who share the name “SVIZHER ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
12 patentsUS9739702B2Aug 22, 2017
Symmetric target design in scatterometry overlay metrology
KLA TENCOR CORP31 citations92
US9080971B2Jul 14, 2015
Metrology systems and methods
KLA TENCOR CORP21 citations92
US8873054B2Oct 28, 2014
Metrology systems and methods
KLA TENCOR CORP14 citations92
US10591406B2Mar 17, 2020
Symmetric target design in scatterometry overlay metrology
KLA TENCOR CORP6 citations82
US9581430B2Feb 28, 2017
Phase characterization of targets
KLA TENCOR CORP15 citations82
US10527952B2Jan 7, 2020
Fault discrimination and calibration of scatterometry overlay targets
KLA TENCOR CORP13 citations81
US10203247B2Feb 12, 2019
Systems for providing illumination in optical metrology
KLA TENCOR CORP10 citations81
US9851300B1Dec 26, 2017
Decreasing inaccuracy due to non-periodic effects on scatterometric signals
KLA TENCOR CORP12 citations80
US11137692B2Oct 5, 2021
Metrology targets and methods with oblique periodic structures
KLA TENCOR CORP3 citations72
US9512985B2Dec 6, 2016
Systems for providing illumination in optical metrology
KLA TENCOR CORP2 citations60
US10699969B2Jun 30, 2020
Quick adjustment of metrology measurement parameters according to process variation
KLA TENCOR CORP1 citations58
US10761022B2Sep 1, 2020
Rotated boundaries of stops and targets
KLA TENCOR CORP0 citations40