Inventor
SELIGSON JOEL
IL15 patents
⚠️ This page may combine multiple inventors who share the name “SELIGSON JOEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
9 patentsUS9080971B2Jul 14, 2015
Metrology systems and methods
KLA TENCOR CORP21 citations92
US8873054B2Oct 28, 2014
Metrology systems and methods
KLA TENCOR CORP14 citations92
US7602491B2Oct 13, 2009
Optical gain approach for enhancement of overlay and alignment systems performance
KLA TENCOR CORP13 citations84
US7724375B1May 25, 2010
Method and apparatus for increasing metrology or inspection tool throughput
KLA TENCOR CORP16 citations78
US9645079B2May 9, 2017
Structured illumination for contrast enhancement in overlay metrology
KLA TENCOR CORP2 citations73
US9442369B1Sep 13, 2016
Method and apparatus for lithographic mask production
KLA TENCOR CORP3 citations72
US10261014B2Apr 16, 2019
Near field metrology
KLA TENCOR CORP2 citations71
US10274425B2Apr 30, 2019
Structured illumination for contrast enhancement in overlay metrology
KLA TENCOR CORP0 citations52
US10139528B1Nov 27, 2018
Compound objectives for imaging and scatterometry overlay
KLA TENCOR CORP0 citations52