Inventor

BACHAR OHAD

IL27 patents

⚠️ This page may combine multiple inventors who share the name “BACHAR OHAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BACHAR OHAD

KLA TENCOR CORP

Metrology systems and methods

Metrology systems and methods

System and method for spectral tuning of broadband light sources

Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology

Apodization for pupil imaging scatterometry

Phase characterization of targets

Systems for providing illumination in optical metrology

Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology

Systems and methods for metrology with layer-specific illumination spectra

System and method for generating multi-channel tunable illumination from a broadband source

Apodization for pupil imaging scatterometry

High-brightness illumination source for optical metrology

Localized telecentricity and focus optimization for overlay metrology

Systems and methods for metrology with layer-specific illumination spectra

Spectral control system

Systems for providing illumination in optical metrology

Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology

Spectral filter for high-power fiber illumination sources

Spectral control system

Nano-structured non-polarizing beamsplitter

KLA CORP

Metrology system and method for measuring diagonal diffraction-based overlay targets

Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology

Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof

Systems and methods for improved metrology for semiconductor device wafers

MANASSEN AMNON

Optics symmetrization for metrology

Overlay metrology by pupil phase analysis

KANDEL DANIEL

Metrology systems and methods