Inventor
IMAI YOSHINORI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “IMAI YOSHINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS8026159B2Sep 27, 2011
Method of manufacturing semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC17 citations91
US6821871B2Nov 23, 2004
Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus
HITACHI INT ELECTRIC INC1 citations51
US9177799B2Nov 3, 2015
Semiconductor device manufacturing method and substrate manufacturing method of forming silicon carbide films on the substrate
HITACHI INT ELECTRIC INC0 citations33
HORII SADAYOSHI
3 patentsUS8415237B2Apr 9, 2013
Method of manufacturing semiconductor device and substrate processing apparatus
HORII SADAYOSHI3 citations60
US8580671B2Nov 12, 2013
Method of manufacturing semiconductor device and substrate processing apparatus
HORII SADAYOSHI1 citations46
US8193083B2Jun 5, 2012
Method of manufacturing semiconductor device and substrate processing apparatus
HORII SADAYOSHI1 citations46
SASAKI TAKAFUMI
2 patentsUS8889533B2Nov 18, 2014
Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus
SASAKI TAKAFUMI0 citations40
US8450220B2May 28, 2013
Substrate processing apparatus , method of manufacturing semiconductor device, and method of manufacturing substrate
SASAKI TAKAFUMI0 citations40