Inventor

Wang yi-xiang

US21 patents

⚠️ This page may combine multiple inventors who share the name “Wang yi-xiang”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

Wang yi-xiang

HERMES MICROVISION INC

Wafer grounding and biasing method, apparatus, and application

Operation stage for wafer edge inspection and review

System and method for calibrating charge-regulating module

Dynamic focus adjustment with optical height detection apparatus in electron beam system

Optical auto focusing system and method for electron beam inspection tool

Particle detection system

System and method for removing charges with enhanced efficiency

Wang yi-xiang

Wafer grounding and biasing method, apparatus, and application

Movable detector for charged particle beam inspection or review

Particle detection system

Phase detector

Particle detection system

ZHAO YAN

Method and apparatus for reducing substrate edge effect during inspection

WANG YI XIANG

Wafer grounding methodology

JAU JACK

E-beam defect review system

XIAO HONG

Method and system for heating substrate in vacuum environment and method and system for identifying defects on substrate

HERMES MICROVISION TAIWAN INC

Method and system of using a scanning electron microscope in semiconductor wafer inspection with Z-stage focus

WANG JOE

Dynamic focus adjustment with optical height detection apparatus in electron beam system

CHEN ZHONG-WEI

Apparatus for increasing electric conductivity to a semiconductor wafer substrate when exposure to electron beam

UNIV HONG KONG CHINESE

Quantitative magnetic resonance imaging relaxometry with suppression of blood signal

KUAN CHIYAN

Charged particle system for reticle/wafer defects inspection and review