P

Inventor

BENVENISTE VICTOR

US16 patents
⚠️ This page may combine multiple inventors who share the name “BENVENISTE VICTOR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

4 patents
US8357912B2Jan 22, 2013

Techniques for providing a multimode ion source

VARIAN SEMICONDUCTOR EQUIPMENT6 citations84
US7807983B2Oct 5, 2010

Technique for reducing magnetic fields at an implant location

VARIAN SEMICONDUCTOR EQUIPMENT8 citations83
US9018829B2Apr 28, 2015

Excited gas injection for ion implant control

VARIAN SEMICONDUCTOR EQUIPMENT2 citations63
US7619228B2Nov 17, 2009

Technique for improved ion beam transport

VARIAN SEMICONDUCTOR EQUIPMENT3 citations62

BENVENISTE VICTOR

3 patents
US8188448B2May 29, 2012

Temperature controlled ion source

BENVENISTE VICTOR8 citations81
US8183542B2May 22, 2012

Temperature controlled ion source

BENVENISTE VICTOR2 citations60
US8263941B2Sep 11, 2012

Mass analysis magnet for a ribbon beam

BENVENISTE VICTOR1 citations50

EATON CORP

1 patent
US5814819ASep 29, 1998

System and method for neutralizing an ion beam using water vapor

EATON CORP32 citations92

KOO BON-WOONG

1 patent
US8501624B2Aug 6, 2013

Excited gas injection for ion implant control

KOO BON-WOONG11 citations83

SINCLAIR FRANK

1 patent
US8436318B2May 7, 2013

Apparatus for controlling the temperature of an RF ion source window

SINCLAIR FRANK16 citations83

KELLERMAN PETER L

1 patent
US8129695B2Mar 6, 2012

System and method for controlling deflection of a charged particle beam within a graded electrostatic lens

KELLERMAN PETER L15 citations83

AXCELIS TECH INC

1 patent
US7151658B2Dec 19, 2006

High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer

AXCELIS TECH INC8 citations73

(unassigned)

1 patent
US5691537ANov 25, 1997

Method and apparatus for ion beam transport

14 citations73

BUFF JAMES S

1 patent
US8466431B2Jun 18, 2013

Techniques for improving extracted ion beam quality using high-transparency electrodes

BUFF JAMES S3 citations54

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

1 patent
US9793087B2Oct 17, 2017

Techniques and apparatus for manipulating an ion beam

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51

TWIN CREEKS TECHNOLOGIES INC

1 patent
US7897945B2Mar 1, 2011

Hydrogen ion implanter using a broad beam source

TWIN CREEKS TECHNOLOGIES INC0 citations50