Inventor
SEAMONS MARTIN J
US10 patents
⚠️ This page may combine multiple inventors who share the name “SEAMONS MARTIN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6913938B2Jul 5, 2005
Feedback control of plasma-enhanced chemical vapor deposition processes
APPLIED MATERIALS INC115 citations96
US9390910B2Jul 12, 2016
Gas flow profile modulated control of overlay in plasma CVD films
APPLIED MATERIALS INC5 citations83
US10373822B2Aug 6, 2019
Gas flow profile modulated control of overlay in plasma CVD films
APPLIED MATERIALS INC2 citations72
US7514125B2Apr 7, 2009
Methods to improve the in-film defectivity of PECVD amorphous carbon films
APPLIED MATERIALS INC2 citations63
US9837265B2Dec 5, 2017
Gas flow profile modulated control of overlay in plasma CVD films
APPLIED MATERIALS INC1 citations62
US7776516B2Aug 17, 2010
Graded ARC for high NA and immersion lithography
APPLIED MATERIALS INC4 citations61
US12334337B2Jun 17, 2025
Integrated flowable low-k gap-fill and plasma treatment
APPLIED MATERIALS INC0 citations50