Inventor
LE ANDREW V
US8 patents
Patents
8 patentsUS6764265B2Jul 20, 2004
Erosion resistant slit valve
APPLIED MATERIALS INC30 citations89
US10330612B2Jun 25, 2019
Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures
APPLIED MATERIALS INC6 citations72
US10580626B2Mar 3, 2020
Arcing detection apparatus for plasma processing
APPLIED MATERIALS INC1 citations62
US10208380B2Feb 19, 2019
Advanced coating method and materials to prevent HDP-CVD chamber arcing
APPLIED MATERIALS INC1 citations60
US10883932B2Jan 5, 2021
Advanced in-situ particle detection system for semiconductor substrate processing systems
APPLIED MATERIALS INC0 citations57
US10655223B2May 19, 2020
Advanced coating method and materials to prevent HDP-CVD chamber arcing
APPLIED MATERIALS INC0 citations50
US10002745B2Jun 19, 2018
Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber
APPLIED MATERIALS INC1 citations50
US10365216B2Jul 30, 2019
Advanced in-situ particle detection system for semiconductor substrate processing systems
APPLIED MATERIALS INC0 citations46