Inventor
Medvedev Vyacheslav Valerievich
RU7 patents
⚠️ This page may combine multiple inventors who share the name “Medvedev Vyacheslav Valerievich”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ISTEQ B V
6 patentsUS9476841B1Oct 25, 2016
High-brightness LPP EUV light source
ISTEQ B V22 citations88
US10588210B1Mar 10, 2020
High brightness short-wavelength radiation source (variants)
ISTEQ B V13 citations82
US10638588B2Apr 28, 2020
High-brightness laser produced plasma source and methods for generating radiation and mitigating debris
ISTEQ B V7 citations81
US10887973B2Jan 5, 2021
High brightness laser-produced plasma light source
ISTEQ B V7 citations80
US11252810B2Feb 15, 2022
Short-wavelength radiation source with multisectional collector module and method of collecting radiation
ISTEQ B V2 citations69
US12028958B2Jul 2, 2024
High-brightness laser produced plasma source and method of generation and collection radiation
ISTEQ B V0 citations48