Inventor
LINEBARGER JR NICK RAY
US13 patents
Patents
13 patentsUS10655225B2May 19, 2020
Substrate pedestal module including backside gas delivery tube and method of making
LAM RES CORP4 citations82
US9738975B2Aug 22, 2017
Substrate pedestal module including backside gas delivery tube and method of making
LAM RES CORP10 citations82
US11634817B2Apr 25, 2023
Substrate pedestal including backside gas-delivery tube
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US11946142B2Apr 2, 2024
Spatially tunable deposition to compensate within wafer differential bow
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US10903070B2Jan 26, 2021
Asymmetric wafer bow compensation by chemical vapor deposition
LAM RES CORP2 citations70
US11408734B2Aug 9, 2022
Distance measurement between gas distribution device and substrate support at high temperatures
LAM RES CORP2 citations69
US10872747B2Dec 22, 2020
Controlling showerhead heating via resistive thermal measurements
LAM RES CORP4 citations68
US10242848B2Mar 26, 2019
Carrier ring structure and chamber systems including the same
LAM RES CORP5 citations66
US12398464B2Aug 26, 2025
Substrate pedestal including backside gas-delivery tube
LAM RES CORP0 citations61
US12050112B2Jul 30, 2024
Distance measurement between gas distribution device and substrate support at high temperatures
LAM RES CORP0 citations59
US12338531B2Jun 24, 2025
Spatially tunable deposition to compensate within wafer differential bow
LAM RES CORP0 citations58
US12272591B2Apr 8, 2025
Friction stir welding in semiconductor manufacturing applications
LAM RES CORP0 citations51
US12539569B2Feb 3, 2026
Grouping features of showerheads in substrate processing systems
LAM RES CORP0 citations47