Inventor
BAILEY CURTIS W
US4 patents
Patents
4 patentsUS11512393B2Nov 29, 2022
Dynamic sheath control with edge ring lift
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US10872747B2Dec 22, 2020
Controlling showerhead heating via resistive thermal measurements
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US12480208B2Nov 25, 2025
Dynamic sheath control with edge ring lift
LAM RES CORP0 citations59
US12516417B2Jan 6, 2026
Faceless showerhead
LAM RES CORP0 citations53