Inventor
UCHIDA YOHEI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “UCHIDA YOHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
17 patentsUSD992614SJul 18, 2023
Focus ring
TOKYO ELECTRON LTD24 citations94
USD992615SJul 18, 2023
Focus ring
TOKYO ELECTRON LTD25 citations91
US11501995B2Nov 15, 2022
Plasma processing apparatus and mounting table thereof
TOKYO ELECTRON LTD7 citations86
US12293937B2May 6, 2025
Plasma processing apparatus and mounting table thereof
TOKYO ELECTRON LTD2 citations75
US12046457B2Jul 23, 2024
Electrostatic chuck, focus ring, support base, plasma processing apparatus, and plasma processing method
TOKYO ELECTRON LTD2 citations73
US10199241B2Feb 5, 2019
Gas supply device and substrate processing apparatus
TOKYO ELECTRON LTD2 citations73
US9887108B2Feb 6, 2018
Gas supply device and substrate processing apparatus
TOKYO ELECTRON LTD5 citations73
US11032899B2Jun 8, 2021
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD4 citations71
US11495445B2Nov 8, 2022
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD1 citations62
US10886108B2Jan 5, 2021
Power feed structure and plasma processing apparatus
TOKYO ELECTRON LTD1 citations62
US11942357B2Mar 26, 2024
Workpiece placement apparatus and processing apparatus
TOKYO ELECTRON LTD0 citations60
US11825589B2Nov 21, 2023
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations60
US11410871B2Aug 9, 2022
Workpiece placement apparatus and processing apparatus
TOKYO ELECTRON LTD0 citations60
US11600471B2Mar 7, 2023
Substrate support, plasma processing apparatus, and focus ring
TOKYO ELECTRON LTD0 citations52
US11984300B2May 14, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US9209060B2Dec 8, 2015
Mounting table structure and method of holding focus ring
TOKYO ELECTRON LTD0 citations41
US10847348B2Nov 24, 2020
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations37
FURUKAWA ELECTRIC CO LTD
3 patentsUS7239784B2Jul 3, 2007
Optical fiber, method for manufacturing same and optical transmission channel
FURUKAWA ELECTRIC CO LTD50 citations93
US7095940B2Aug 22, 2006
Optical fiber, method for manufacturing same and optical transmission channel
FURUKAWA ELECTRIC CO LTD41 citations89
US6665482B2Dec 16, 2003
Optical fiber and optical transmission line
FURUKAWA ELECTRIC CO LTD9 citations69