Inventor
YAHATA SHOJIRO
JP4 patents
Patents
4 patentsUS11032899B2Jun 8, 2021
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD4 citations71
US11825589B2Nov 21, 2023
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations60
US11961718B2Apr 16, 2024
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US8052364B2Nov 8, 2011
Coupling member and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48