Inventor
KANEMURA RUI
JP5 patents
Patents
5 patentsUS11251034B2Feb 15, 2022
Film forming method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11101131B2Aug 24, 2021
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations59
US11114297B2Sep 7, 2021
Method for forming semiconductor film and film forming device
TOKYO ELECTRON LTD0 citations57
US11658028B2May 23, 2023
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations48
US11807938B2Nov 7, 2023
Exhaust device, processing system, and processing method
TOKYO ELECTRON LTD0 citations47