Inventor
PINTER STEFAN
DE60 patents
⚠️ This page may combine multiple inventors who share the name “PINTER STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
37 patentsUS6106735AAug 22, 2000
Wafer stack and method of producing sensors
BOSCH GMBH ROBERT102 citations97
US6360605B1Mar 26, 2002
Micromechanical device
BOSCH GMBH ROBERT73 citations94
US6778400B2Aug 17, 2004
Electronic device
BOSCH GMBH ROBERT21 citations92
US6528868B1Mar 4, 2003
Lead frame device and method for producing the same
BOSCH GMBH ROBERT34 citations92
US6462392B1Oct 8, 2002
Micromechanical cap structure and the respective manufacturing method
BOSCH GMBH ROBERT27 citations92
US7148077B2Dec 12, 2006
Micromechanical structural element having a diaphragm and method for producing such a structural element
BOSCH GMBH ROBERT27 citations91
US6936902B2Aug 30, 2005
Sensor with at least one micromechanical structure and method for production thereof
BOSCH GMBH ROBERT34 citations91
US7299818B2Nov 27, 2007
Integrated microvalve and method for manufacturing a microvalve
BOSCH GMBH ROBERT14 citations83
US5872309AFeb 16, 1999
Method for checking the sealing of a package and apparatus for measuring viscosity
BOSCH GMBH ROBERT16 citations74
US7273764B2Sep 25, 2007
Sensor with at least one micromechanical structure, and method for producing it
BOSCH GMBH ROBERT6 citations72
US6620735B2Sep 16, 2003
Method for processing substrates
BOSCH GMBH ROBERT7 citations72
US11360270B2Jun 14, 2022
MEMS optical switch with stop control
BOSCH GMBH ROBERT3 citations71
US11340399B2May 24, 2022
In-plane MEMS optical switch
BOSCH GMBH ROBERT4 citations71
US11300852B2Apr 12, 2022
MEMS optical switch with a cantilever coupler
BOSCH GMBH ROBERT3 citations71
US11130672B2Sep 28, 2021
Micromechanical device and corresponding production method
BOSCH GMBH ROBERT2 citations66
US7992442B2Aug 9, 2011
Component and method for its manufacture
BOSCH GMBH ROBERT3 citations63
US7843620B2Nov 30, 2010
Micromirror system
BOSCH GMBH ROBERT3 citations63
US7073400B2Jul 11, 2006
Sensor for measuring pressure in a sealed volume
BOSCH GMBH ROBERT3 citations63
US6782749B2Aug 31, 2004
Micromechanical component
BOSCH GMBH ROBERT5 citations63
US11124412B2Sep 21, 2021
Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure
BOSCH GMBH ROBERT0 citations62
US10996461B2May 4, 2021
Protective wafer including inclined optical windows and device
BOSCH GMBH ROBERT0 citations62
US7059186B2Jun 13, 2006
Integrated flow sensor for measuring a fluid flow
BOSCH GMBH ROBERT6 citations62
US7740459B2Jun 22, 2010
Micropump having a pump diaphragm and a polysilicon layer
BOSCH GMBH ROBERT6 citations61
US12195330B2Jan 14, 2025
Method for producing a plurality of sensor devices, and sensor device
BOSCH GMBH ROBERT0 citations56
US11906383B2Feb 20, 2024
Micromechanical sensor device having an ASIC chip integrated into a capping unit and corresponding manufacturing method
BOSCH GMBH ROBERT0 citations52
US11479461B2Oct 25, 2022
Production method for a micromechanical device having inclined optical windows, and micromechanical device having inclined optical windows
BOSCH GMBH ROBERT0 citations52
US10663624B2May 26, 2020
Method for creating a nanostructure in a transparent substrate
BOSCH GMBH ROBERT0 citations52
US10591721B2Mar 17, 2020
Method for manufacturing a protective wafer including inclined optical windows and device
BOSCH GMBH ROBERT0 citations52
US9618740B2Apr 11, 2017
Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device
BOSCH GMBH ROBERT0 citations51
US8384975B2Feb 26, 2013
Micromechanical assembly having a displaceable component
BOSCH GMBH ROBERT0 citations51
US8344831B2Jan 1, 2013
Magnetic yoke, micromechanical component and method for producing a magnetic yoke and a micromechanical component
BOSCH GMBH ROBERT1 citations51
US11066295B2Jul 20, 2021
Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis
BOSCH GMBH ROBERT0 citations50
US10222609B2Mar 5, 2019
Micromirror arrangement and projection device
BOSCH GMBH ROBERT0 citations50
US10012828B2Jul 3, 2018
Assembly body for micromirror chips, mirror device and production method for a mirror device
BOSCH GMBH ROBERT0 citations49
US11584640B2Feb 21, 2023
Method for producing a micromechanical device having inclined optical windows, and corresponding micromechanical device
BOSCH GMBH ROBERT0 citations48
US10840107B2Nov 17, 2020
Method for forming a cavity and a component having a cavity
BOSCH GMBH ROBERT0 citations48
US10431474B2Oct 1, 2019
Method for forming a cavity and a component having a cavity
BOSCH GMBH ROBERT0 citations48
PINTER STEFAN
9 patentsUS9791663B2Oct 17, 2017
Magnetically drivable micromirror
PINTER STEFAN2 citations72
US10690906B2Jun 23, 2020
Magnetic actuator
PINTER STEFAN1 citations62
US8896897B2Nov 25, 2014
Micromechanical component and a method for operating a micromechanical component
PINTER STEFAN3 citations61
US8981500B2Mar 17, 2015
Method for producing an optical window device for a MEMS device
PINTER STEFAN1 citations52
US8736934B2May 27, 2014
Assembly having a displaceable part and method for operating an assembly having a displaceable part
PINTER STEFAN1 citations52
US8648433B2Feb 11, 2014
Method for producing oblique surfaces in a substrate and wafer having an oblique surface
PINTER STEFAN1 citations52
US8550639B2Oct 8, 2013
Cover device for a micro-optomechanical component, and manufacturing method for such a cover device
PINTER STEFAN1 citations52
US8699115B2Apr 15, 2014
Production method for a micromechanical component, and a micromechanical component
PINTER STEFAN1 citations51
US8179584B2May 15, 2012
Micromechanical component having a swiveling part and method for producing same
PINTER STEFAN0 citations50
PIRK TJALF
2 patentsUS8847336B2Sep 30, 2014
Micromechanical component having an inclined structure and corresponding manufacturing method
PIRK TJALF2 citations61
US8581470B2Nov 12, 2013
Electrode comb, micromechanical component, and method for producing an electrode comb or a micromechanical component
PIRK TJALF2 citations61
MASSACHUSETTS GEN HOSPITAL
1 patentKRAMER TORSTEN
1 patentShowing the top 50 of 60 patents by PatentIndex Score.