P

Inventor

PINTER STEFAN

DE60 patents
⚠️ This page may combine multiple inventors who share the name “PINTER STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BOSCH GMBH ROBERT

37 patents
US6106735AAug 22, 2000

Wafer stack and method of producing sensors

BOSCH GMBH ROBERT102 citations97
US6360605B1Mar 26, 2002

Micromechanical device

BOSCH GMBH ROBERT73 citations94
US6778400B2Aug 17, 2004

Electronic device

BOSCH GMBH ROBERT21 citations92
US6528868B1Mar 4, 2003

Lead frame device and method for producing the same

BOSCH GMBH ROBERT34 citations92
US6462392B1Oct 8, 2002

Micromechanical cap structure and the respective manufacturing method

BOSCH GMBH ROBERT27 citations92
US7148077B2Dec 12, 2006

Micromechanical structural element having a diaphragm and method for producing such a structural element

BOSCH GMBH ROBERT27 citations91
US6936902B2Aug 30, 2005

Sensor with at least one micromechanical structure and method for production thereof

BOSCH GMBH ROBERT34 citations91
US7299818B2Nov 27, 2007

Integrated microvalve and method for manufacturing a microvalve

BOSCH GMBH ROBERT14 citations83
US5872309AFeb 16, 1999

Method for checking the sealing of a package and apparatus for measuring viscosity

BOSCH GMBH ROBERT16 citations74
US7273764B2Sep 25, 2007

Sensor with at least one micromechanical structure, and method for producing it

BOSCH GMBH ROBERT6 citations72
US6620735B2Sep 16, 2003

Method for processing substrates

BOSCH GMBH ROBERT7 citations72
US11360270B2Jun 14, 2022

MEMS optical switch with stop control

BOSCH GMBH ROBERT3 citations71
US11340399B2May 24, 2022

In-plane MEMS optical switch

BOSCH GMBH ROBERT4 citations71
US11300852B2Apr 12, 2022

MEMS optical switch with a cantilever coupler

BOSCH GMBH ROBERT3 citations71
US11130672B2Sep 28, 2021

Micromechanical device and corresponding production method

BOSCH GMBH ROBERT2 citations66
US7992442B2Aug 9, 2011

Component and method for its manufacture

BOSCH GMBH ROBERT3 citations63
US7843620B2Nov 30, 2010

Micromirror system

BOSCH GMBH ROBERT3 citations63
US7073400B2Jul 11, 2006

Sensor for measuring pressure in a sealed volume

BOSCH GMBH ROBERT3 citations63
US6782749B2Aug 31, 2004

Micromechanical component

BOSCH GMBH ROBERT5 citations63
US11124412B2Sep 21, 2021

Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure

BOSCH GMBH ROBERT0 citations62
US10996461B2May 4, 2021

Protective wafer including inclined optical windows and device

BOSCH GMBH ROBERT0 citations62
US7059186B2Jun 13, 2006

Integrated flow sensor for measuring a fluid flow

BOSCH GMBH ROBERT6 citations62
US7740459B2Jun 22, 2010

Micropump having a pump diaphragm and a polysilicon layer

BOSCH GMBH ROBERT6 citations61
US12195330B2Jan 14, 2025

Method for producing a plurality of sensor devices, and sensor device

BOSCH GMBH ROBERT0 citations56
US11906383B2Feb 20, 2024

Micromechanical sensor device having an ASIC chip integrated into a capping unit and corresponding manufacturing method

BOSCH GMBH ROBERT0 citations52
US11479461B2Oct 25, 2022

Production method for a micromechanical device having inclined optical windows, and micromechanical device having inclined optical windows

BOSCH GMBH ROBERT0 citations52
US10663624B2May 26, 2020

Method for creating a nanostructure in a transparent substrate

BOSCH GMBH ROBERT0 citations52
US10591721B2Mar 17, 2020

Method for manufacturing a protective wafer including inclined optical windows and device

BOSCH GMBH ROBERT0 citations52
US9618740B2Apr 11, 2017

Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device

BOSCH GMBH ROBERT0 citations51
US8384975B2Feb 26, 2013

Micromechanical assembly having a displaceable component

BOSCH GMBH ROBERT0 citations51
US8344831B2Jan 1, 2013

Magnetic yoke, micromechanical component and method for producing a magnetic yoke and a micromechanical component

BOSCH GMBH ROBERT1 citations51
US11066295B2Jul 20, 2021

Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis

BOSCH GMBH ROBERT0 citations50
US10222609B2Mar 5, 2019

Micromirror arrangement and projection device

BOSCH GMBH ROBERT0 citations50
US10012828B2Jul 3, 2018

Assembly body for micromirror chips, mirror device and production method for a mirror device

BOSCH GMBH ROBERT0 citations49
US11584640B2Feb 21, 2023

Method for producing a micromechanical device having inclined optical windows, and corresponding micromechanical device

BOSCH GMBH ROBERT0 citations48
US10840107B2Nov 17, 2020

Method for forming a cavity and a component having a cavity

BOSCH GMBH ROBERT0 citations48
US10431474B2Oct 1, 2019

Method for forming a cavity and a component having a cavity

BOSCH GMBH ROBERT0 citations48

PINTER STEFAN

9 patents

PIRK TJALF

2 patents

MASSACHUSETTS GEN HOSPITAL

1 patent

KRAMER TORSTEN

1 patent

Showing the top 50 of 60 patents by PatentIndex Score.