Inventor
TAMADA Miki
JP7 patents
Patents
7 patentsUS11426761B2Aug 30, 2022
Modification method of surface of base, composition, and polymer
JSR CORP2 citations71
US12372869B2Jul 29, 2025
Method for forming resist pattern and radiation-sensitive resin composition
JSR CORP0 citations58
US11525067B2Dec 13, 2022
Modification method of substrate surface, and composition and polymer
JSR CORP0 citations50
US11462405B2Oct 4, 2022
Pattern-forming method and patterned substrate
JSR CORP0 citations50
US11603480B2Mar 14, 2023
Composition for underlayer film formation, underlayer film for directed self-assembled film and forming method thereof, and directed self-assembly lithography process
JSR CORP0 citations49
US11578230B2Feb 14, 2023
Composition, polymer, and method of producing substrate
JSR CORP0 citations46
US11745216B2Sep 5, 2023
Method for producing film
JSR CORP0 citations45