Inventor
CHU YANG-ANN
TW56 patents
Patents
50 patentsUS10622236B2Apr 14, 2020
Apparatus and method for handling wafer carrier doors
TAIWAN SEMICONDUCTOR MFG CO LTD283 citations98
US11222802B1Jan 11, 2022
Multiple semiconductor die container load port
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations86
US12125725B2Oct 22, 2024
Integrated semiconductor die vessel processing workstations
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11721572B2Aug 8, 2023
Integrated semiconductor die vessel processing workstations
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11651984B2May 16, 2023
Multiple transport carrier docking device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11488848B2Nov 1, 2022
Integrated semiconductor die vessel processing workstations
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11302552B1Apr 12, 2022
Multiple transport carrier docking device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11302553B1Apr 12, 2022
Transport carrier docking device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10854490B2Dec 1, 2020
Wafer carrier handling apparatus and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11784073B2Oct 10, 2023
Apparatus and method for handling wafer carrier doors
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US11270900B2Mar 8, 2022
Apparatus and method for handling wafer carrier doors
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11835866B2Dec 5, 2023
Method and system of surface topography measurement for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11487210B1Nov 1, 2022
Method and system of surface topography measurement for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US12472595B2Nov 18, 2025
Systems for removing or inserting a fastener from or into a wafer carrier
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12347704B2Jul 1, 2025
Wafer alignment apparatus and method for multi-cassette load port
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12151324B2Nov 26, 2024
Methods for inserting a fastener into a wafer carrier
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12084307B2Sep 10, 2024
Reeling device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US11752582B1Sep 12, 2023
Methods for removing a fastener from a wafer carrier
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12519006B2Jan 6, 2026
Wafer lift pin system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12482685B2Nov 25, 2025
Apparatus and methods for automatically handling die carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12327747B2Jun 10, 2025
Transport carrier docking device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12261069B2Mar 25, 2025
Multiple semiconductor die container load port
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12237196B2Feb 25, 2025
Docking device with moveable frame and sealing component
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12142507B2Nov 12, 2024
Systems and methods for air flow optimization in environment for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12119251B2Oct 15, 2024
Multiple semiconductor die container load port
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12080575B2Sep 3, 2024
Airflow detection device and methods of use
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11972971B2Apr 30, 2024
Wafer lift pin system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11923225B2Mar 5, 2024
Processing arrangement and method for adjusting gas flow
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11735455B2Aug 22, 2023
Systems, devices, and methods for air flow optimization including adjacent a FOUP
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11699619B2Jul 11, 2023
Automated transfer and drying tool for process chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11508596B2Nov 22, 2022
Apparatus and methods for automatically handling die carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11158531B2Oct 26, 2021
Wafer cassette handling apparatus and operating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10991625B2Apr 27, 2021
Automated transfer and drying tool for process chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10510573B2Dec 17, 2019
Loading apparatus and operating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12580390B2Mar 17, 2026
Under-floor charging station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12189306B2Jan 7, 2025
Method and system of surface topography measurement for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11915954B2Feb 27, 2024
Multi-flip semiconductor die sorter tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11569105B2Jan 31, 2023
Multi-flip semiconductor die sorter tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11437843B2Sep 6, 2022
Under-floor charging station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11348816B2May 31, 2022
Systems and methods for die container warehousing
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12434870B2Oct 7, 2025
Integrated semiconductor die parceling platforms
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12300532B2May 13, 2025
Wafer frame sorter and stocker
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11851224B2Dec 26, 2023
Integrated semiconductor die parceling platforms
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11813649B2Nov 14, 2023
Semiconductor arrangement and method for making
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11786947B2Oct 17, 2023
Semiconductor arrangement and method for making
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11299302B2Apr 12, 2022
Integrated semiconductor die parceling platforms
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11251064B2Feb 15, 2022
Wafer frame sorter and stocker
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11682571B2Jun 20, 2023
Apparatus and methods for handling die carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11398396B2Jul 26, 2022
Apparatus and methods for handling die carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12528198B2Jan 20, 2026
Robot magazine and tray load and unload system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
Showing the top 50 of 56 patents by PatentIndex Score.