Inventor
CHOI BYOUNG DOO
KR8 patents
Patents
8 patentsUS12230510B2Feb 18, 2025
Substrate treating apparatus and method for the same
SEMES CO LTD1 citations62
US12366239B2Jul 22, 2025
Pump, apparatus for supplying chemical liquid and apparatus for processing substrate
SEMES CO LTD0 citations60
US12429042B2Sep 30, 2025
Torsion pump and chemical liquid supply unit
SEMES CO LTD0 citations59
US12331736B2Jun 17, 2025
Pump, chemical liquid supplying unit, and substrate treating apparatus
SEMES CO LTD0 citations59
US12125717B2Oct 22, 2024
Apparatus for treating substrate
SEMES CO LTD0 citations59
US12228861B2Feb 18, 2025
Apparatus for treating substrate
SEMES CO LTD0 citations47
US12140868B2Nov 12, 2024
Substrate treating apparatus with exhaust airflow guide
SEMES CO LTD0 citations47
US11710654B2Jul 25, 2023
Substrate transport apparatus, substrate processing apparatus, and substrate transport method
SEMES CO LTD0 citations47