Inventor
ADERHOLD WOLFGANG
US25 patents
⚠️ This page may combine multiple inventors who share the name “ADERHOLD WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS9390950B2Jul 12, 2016
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC15 citations92
US7414224B2Aug 19, 2008
Backside rapid thermal processing of patterned wafers
APPLIED MATERIALS INC16 citations92
US6164816ADec 26, 2000
Tuning a substrate temperature measurement system
APPLIED MATERIALS INC53 citations92
US7398693B2Jul 15, 2008
Adaptive control method for rapid thermal processing of a substrate
APPLIED MATERIALS INC19 citations91
US6803546B1Oct 12, 2004
Thermally processing a substrate
APPLIED MATERIALS INC25 citations91
US9564349B2Feb 7, 2017
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC4 citations84
US8900889B2Dec 2, 2014
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC10 citations84
US11735447B2Aug 22, 2023
Enhanced process and hardware architecture to detect and correct realtime product substrates
APPLIED MATERIALS INC2 citations71
US12390843B2Aug 19, 2025
Rapid thermal processing (RTP) chamber outgassing removal
APPLIED MATERIALS INC0 citations62
US12379253B2Aug 5, 2025
Emissivity independence tuning
APPLIED MATERIALS INC0 citations62
US12278127B2Apr 15, 2025
Auto fine-tuner for desired temperature profile
APPLIED MATERIALS INC0 citations62
US12261047B2Mar 25, 2025
Doping techniques
APPLIED MATERIALS INC0 citations62
US11443948B2Sep 13, 2022
Doping techniques
APPLIED MATERIALS INC0 citations62
US12278101B2Apr 15, 2025
Coded substrate material identifier communication tool
APPLIED MATERIALS INC0 citations52
US12169098B2Dec 17, 2024
RTP substrate temperature one for all control algorithm
APPLIED MATERIALS INC0 citations52
US11942345B2Mar 26, 2024
Automated substrate placement to chamber center
APPLIED MATERIALS INC0 citations52
US12159797B2Dec 3, 2024
Pyrometry error detection sensor for RTP temperature control system
APPLIED MATERIALS INC0 citations44
ADERHOLD WOLFGANG
5 patentsUS8658945B2Feb 25, 2014
Backside rapid thermal processing of patterned wafers
ADERHOLD WOLFGANG5 citations83
US8109669B2Feb 7, 2012
Temperature uniformity measurement during thermal processing
ADERHOLD WOLFGANG8 citations83
US8104951B2Jan 31, 2012
Temperature uniformity measurements during rapid thermal processing
ADERHOLD WOLFGANG18 citations83
US9431278B2Aug 30, 2016
Backside rapid thermal processing of patterned wafers
ADERHOLD WOLFGANG3 citations72
US9640412B2May 2, 2017
Apparatus and method for enhancing the cool down of radiatively heated substrates
ADERHOLD WOLFGANG1 citations51