Inventor

HUANG YI-CHIAU

US45 patents

⚠️ This page may combine multiple inventors who share the name “HUANG YI-CHIAU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUANG YI-CHIAU

APPLIED MATERIALS INC

Method of selective silicon germanium epitaxy at low temperatures

Method to grow thin epitaxial films at low temperature

Method for monitoring and calibrating temperature in semiconductor processing chambers

Atomic layer deposition processes for non-volatile memory devices

Low temperature ALD SiO2

Atomic layer deposition processes for non-volatile memory devices

Method to grow thin epitaxial films at low temperature

Thermal processing susceptor

Thermal processing susceptor

Selective epitaxial germanium growth on silicon-trench fill and in situ doping

Low temperature ALD SiO2

Semiconductor device, method of making a semiconductor device, and processing system

Method to enhance growth rate for selective epitaxial growth

Method of forming strain-relaxed buffer layers

Method of doped germanium formation

Method of fabricating a semiconductor device having reduced contact resistance

Method of growing doped group IV materials

Methods for depositing a tin-containing layer on a substrate

Thermal processing susceptor

Doping techniques

Thermal processing susceptor

Doping techniques

Methods and apparatus for integrated selective monolayer doping

Fin formation by epitaxial deposition

Anisotropic sige:b epitaxial film growth for gate all around transistor

Selective methods for fabricating devices and structures

Chamber components with increased pyrometry visibility

Selective SIGESN:B deposition

Structure and material engineering methods for optoelectronic devices signal to noise ratio enhancement

Oxidation barriers with CVD soak processes

Multizone lamp control and individual lamp control in a lamphead

Graded superlattice structure for gate all around devices

Method to enhance growth rate for selective epitaxial growth

Methods for depositing group III-V layers on substrates

Method of epitaxial germanium tin alloy surface preparation

Selective low temperature epitaxial deposition process

Methods for chemical mechanical planarization of patterned wafers

HUANG YI-CHIAU

Methods for forming silicon germanium layers

Methods for low temperature conditioning of process chambers

Method of forming high growth rate, low resistivity germanium film on silicon substrate

Method of forming high growth rate, low resistivity germanium film on silicon substrate

SANCHEZ ERROL ANTONIO C

Method of epitaxial germanium tin alloy surface preparation

Method of epitaxial doped germanium tin alloy formation

Methods and apparatus for forming silicon germanium-carbon semiconductor structures

SANCHEZ ERROL

Methods for depositing germanium-containing layers