Inventor
MAYUR ABHILASH
US10 patents
⚠️ This page may combine multiple inventors who share the name “MAYUR ABHILASH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS7595208B2Sep 29, 2009
Method of laser annealing using two wavelengths of radiation
APPLIED MATERIALS INC22 citations96
US7279721B2Oct 9, 2007
Dual wavelength thermal flux laser anneal
APPLIED MATERIALS INC46 citations96
US6280183B1Aug 28, 2001
Substrate support for a thermal processing chamber
APPLIED MATERIALS INC105 citations94
US6803546B1Oct 12, 2004
Thermally processing a substrate
APPLIED MATERIALS INC25 citations91
US7569463B2Aug 4, 2009
Method of thermal processing structures formed on a substrate
APPLIED MATERIALS INC9 citations83
US7772134B2Aug 10, 2010
Method of annealing using two wavelengths of continuous wave laser radiation
APPLIED MATERIALS INC7 citations74
US12261047B2Mar 25, 2025
Doping techniques
APPLIED MATERIALS INC0 citations62
US11443948B2Sep 13, 2022
Doping techniques
APPLIED MATERIALS INC0 citations62
US11859277B2Jan 2, 2024
Catalyst enhanced molybdenum deposition and gap fill
APPLIED MATERIALS INC0 citations50