Inventor
WAKIYAMA TERUFUMI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “WAKIYAMA TERUFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS9773687B2Sep 26, 2017
Liquid processing apparatus
TOKYO ELECTRON LTD11 citations83
US9953848B2Apr 24, 2018
Substrate liquid processing apparatus
TOKYO ELECTRON LTD6 citations72
US9387520B2Jul 12, 2016
Liquid processing apparatus and cleaning method
TOKYO ELECTRON LTD4 citations69
US10297473B2May 21, 2019
Liquid processing apparatus
TOKYO ELECTRON LTD1 citations62
US10276425B2Apr 30, 2019
Substrate processing system
TOKYO ELECTRON LTD1 citations61
US9108231B2Aug 18, 2015
Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein
TOKYO ELECTRON LTD0 citations51
US11322373B2May 3, 2022
Liquid processing apparatus
TOKYO ELECTRON LTD0 citations50
US12269052B2Apr 8, 2025
Substrate liquid processing apparatus and liquid discharge evaluation method
TOKYO ELECTRON LTD0 citations48
US10460962B2Oct 29, 2019
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations40