Inventor

DOUKI YUICHI

JP22 patents

⚠️ This page may combine multiple inventors who share the name “DOUKI YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DOUKI YUICHI

TOKYO ELECTRON LTD

Substrate processing apparatus and method for adjusting a substrate transfer position

Jig for detecting position

Substrate processing apparatus, substrate processing method and non-transitory storage medium

Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium

Substrate processing apparatus, substrate processing method and recording medium

Substrate processing method and substrate processing apparatus

Liquid processing aparatus

Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position

Processing apparatus, processing method, and storage medium

Substrate liquid processing apparatus and liquid discharge evaluation method

Substrate processing apparatus and substrate processing method

Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium

Processing apparatus, processing method, and storage medium

HAYASHI SHINICHI

Coating and developing apparatus, coating and developing method and non-transitory tangible medium

Coating and developing apparatus, coating and developing method and non-transitory tangible medium

MATSUMOTO TOSHIYUKI

Jig for detecting position

Position detecting method for performing position alignment of transfer point of transfer arm

YANO MITSUTERU

Substrate transfer apparatus and substrate treatment system

MURATA AKIRA

Substrate transfer apparatus, substrate process system, and substrate transfer method

TOKYO ELECETRON LTD

Substrate processing apparatus and substrate processing method

MITSUI HIGH TEC

Semiconductor device and lead frame assembly/lead frame for making a semiconductor device

DOUKI YUICHI

Substrate holder positioning method and substrate processing system