Inventor
PAN TZU-JUNG
TW6 patents
Patents
6 patentsUS11693326B1Jul 4, 2023
System and method for dynamically controlling temperature of thermostatic reticles
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations85
US12541152B2Feb 3, 2026
EUV lithography system with 3D sensing and tunning modules
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12461454B2Nov 4, 2025
Semiconductor processing tool and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12372880B2Jul 29, 2025
System and method for detecting debris in a photolithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12235593B2Feb 25, 2025
System and method for dynamically controlling temperature of thermostatic reticles
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11852978B2Dec 26, 2023
EUV lithography system with 3D sensing and tunning modules
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62