Inventor

OSHIDA YOSHITADA

JP54 patents

⚠️ This page may combine multiple inventors who share the name “OSHIDA YOSHITADA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OSHIDA YOSHITADA

HITACHI LTD

Method of inspecting a DNA chip

Method and apparatus for pattern exposure, mask used therefor, and semiconductor integrated circuit produced by using them

Pattern detecting method, pattern detecting apparatus, projection exposing apparatus using the same and exposure system

Exposure apparatus and method

Illumination apparatus for exposure

Exposure apparatus and method of aligning exposure mask with workpiece

Shape testing apparatus

Information reproducing apparatus with plural beam readout

Illuminating method and illuminating apparatus for carrying out the same, and projection exposure method and projection exposure apparatus for carrying out the same

Illumination method, illumination apparatus and projection exposure apparatus

Lithographic apparatus and method

Semiconductor exposing system having apparatus for correcting change in wavelength of light source

Exposure apparatus with foreign particle detector

Biological sample optical measuring method and biological sample optical measuring apparatus

Method and apparatus for inspecting DNA and method for detecting fluorescence

Exposure apparatus and method

Exposure apparatus and method

Exposure apparatus and method

Exposure method and apparatus

Projection exposure apparatus and projection exposure method

Projection exposure apparatus and projection exposure method

Three-dimensional shape measuring device

Method of inspecting a DNA chip and apparatus thereof

Method in inspecting DNA and apparatus therefor

Exposure apparatus and method

Method and apparatus for optical alignment of semiconductor by using a hologram

Reflection type optical focusing apparatus

Plate thickness measuring method and apparatus

Configuration detecting method and system

Alignment of an optical assembly

Optical apparatus for laser machining

Method of detecting inclination of a specimen and a projection exposure device as well as method of detecting period of periodically varying signal

Reduction projection type aligner

Pattern position detecting method and apparatus for detecting the position of an alignment direction of a wafer target pattern

Semiconductor exposure apparatus and alignment method therefor

Exposure apparatus and method

Method and apparatus for pattern detection

Alignment detection optical system of projection type aligner

Alignment method and apparatus for reduction projection type aligner

Videodisc play-back apparatus with variable width beam

Projection type exposure method and apparatus

Reduced-projection exposure system with chromatic aberration correction system including diffractive lens such as holographic lens

Reduction projection system alignment method and apparatus

Method and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interference

HITACHI VIA MECHANICS LTD

Laser direct imaging apparatus

Pattern exposure method and pattern exposure apparatus

RENESAS TECH CORP

Exposure apparatus and method

Exposure apparatus and method

HITACHI HIGH TECH CORP

Apparatus and method for measuring micro area in specimen

HITACHI DISPLAYS LTD

Method and apparatus for imparting alignment to alignment layer through generation of two kinds of polarized light from a single light source and treatment with both