Inventor

NAKAMURA HATSUO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “NAKAMURA HATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO SHIBAURA ELECTRIC CO

2 patents

US4610079ASep 9, 1986

Method of dicing a semiconductor wafer

TOKYO SHIBAURA ELECTRIC CO111 citations94

US4461825AJul 24, 1984

Method for forming resist pattern

TOKYO SHIBAURA ELECTRIC CO6 citations60

TOSHIBA KK

1 patent

US5305222AApr 19, 1994

Pattern forming system

TOSHIBA KK20 citations89

KANTO KAGAKU

1 patent

US4525523AJun 25, 1985

Negative-working photoresist coating composition

KANTO KAGAKU7 citations71