Inventor
KAPLAN RICHARD D
US17 patents
⚠️ This page may combine multiple inventors who share the name “KAPLAN RICHARD D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
10 patentsUS5198153AMar 30, 1993
Electrically conductive polymeric
IBM232 citations97
US7056782B2Jun 6, 2006
CMOS silicide metal gate integration
IBM25 citations92
US5202061AApr 13, 1993
Electrically conductive polymeric materials and uses thereof
IBM50 citations91
US5200112AApr 6, 1993
Electrically conductive polymeric materials and uses thereof
IBM45 citations91
US4826564AMay 2, 1989
Method of selective reactive ion etching of substrates
IBM33 citations90
US6569781B1May 27, 2003
Method of forming an ultra-thin oxide layer on a silicon substrate by implantation of nitrogen through a sacrificial layer and subsequent annealing prior to oxide formation
IBM17 citations84
US7411227B2Aug 12, 2008
CMOS silicide metal gate integration
IBM7 citations73
US4414314ANov 8, 1983
Resolution in optical lithography
IBM12 citations73
US7655557B2Feb 2, 2010
CMOS silicide metal gate integration
IBM4 citations62
US4497891AFeb 5, 1985
Dry-developed, negative working electron resist system
IBM3 citations62