Inventor
CHEN CHENSON K
US6 patents
Patents
6 patentsUS5296089AMar 22, 1994
Enhanced radiative zone-melting recrystallization method and apparatus
MASSACHUSETTS INST TECHNOLOGY70 citations94
US5173271ADec 22, 1992
Enhanced radiative zone-melting recrystallization method and apparatus
MASSACHUSETTS INST TECHNOLOGY48 citations91
US5066610ANov 19, 1991
Capping technique for zone-melting recrystallization of insulated semiconductor films
MASSACHUSETTS INST TECHNOLOGY19 citations72
US4889583ADec 26, 1989
Capping technique for zone-melting recrystallization of insulated semiconductor films
MASSACHUSETTS INST TECHNOLOGY12 citations72
US5308594AMay 3, 1994
Edge-heat-sink technique for zone melting recrystallization of semiconductor-on-insulator films
MASSACHUSETTS INST TECHNOLOGY12 citations71
US5160575ANov 3, 1992
Edge-heat sink technqiue for zone melting recrystallization of semiconductor-on-insulator films
MASSACHUSETTS INST TECHNOLOGY9 citations71