Inventor
FOSTER ROBERT J
US9 patents
⚠️ This page may combine multiple inventors who share the name “FOSTER ROBERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS8736275B2May 27, 2014
Alignment correction system and method of use
IBM0 citations50
US8680871B2Mar 25, 2014
Alignment correction system and method of use
IBM0 citations50
US7592817B2Sep 22, 2009
Alignment correction system and method of use
IBM0 citations50
US7542136B2Jun 2, 2009
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput
IBM1 citations50