Inventor

BESEN MATTHEW M

US22 patents

⚠️ This page may combine multiple inventors who share the name “BESEN MATTHEW M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BESEN MATTHEW M

APPLIED SCIENCE & TECH INC

Microwave plasma reactor

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

Microwave plasma reactor

Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate

Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube

Fluid-cooled dielectric window for a plasma system

ENERGETIQ TECHNOLOGY INC

Inductively-driven plasma light source

Inductively-driven plasma light source

Inductively-driven plasma light source

Inductively-driven light source for lithography

Inductively-driven light source for microscopy

MKS INSTR INC

Radial flow turbomolecular vacuum pump

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

Ion storage system

Method and apparatus for fluorine generation and recirculation

ENERGETIQ TECH INC

X-ray generation apparatus

Rotary anode unit and X-ray generation apparatus

SMITH DONALD K

Method for inductively-driven plasma light source

APPLIED SCIENCE & TECHNOLOGY I

Ozone and other reactive gas generator cell and system

HAMAMATSU PHOTONICS KK

Inductively coupled plasma light source with switched power supply

HOLBER WILLIAM M

Laser-heated infrared source