Inventor
SEVILLANO EVELIO
US8 patents
⚠️ This page may combine multiple inventors who share the name “SEVILLANO EVELIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED SCIENCE & TECH INC
4 patentsUS5501740AMar 26, 1996
Microwave plasma reactor
APPLIED SCIENCE & TECH INC483 citations98
US5556475ASep 17, 1996
Microwave plasma reactor
APPLIED SCIENCE & TECH INC52 citations95
US5518759AMay 21, 1996
High growth rate plasma diamond deposition process and method of controlling same
APPLIED SCIENCE & TECH INC21 citations89
US5405645AApr 11, 1995
High growth rate plasma diamond deposition process and method of controlling same
APPLIED SCIENCE & TECH INC27 citations89
LAM RES CORP
4 patentsUS10651097B2May 12, 2020
Using identifiers to map edge ring part numbers onto slot numbers
LAM RES CORP3 citations68
US8900470B2Dec 2, 2014
Differential measurements for endpoint signal enhancement
LAM RES CORP1 citations50
US9941178B2Apr 10, 2018
Methods for detecting endpoint for through-silicon via reveal applications
LAM RES CORP0 citations48
US9543225B2Jan 10, 2017
Systems and methods for detecting endpoint for through-silicon via reveal applications
LAM RES CORP0 citations48