Inventor
KOTECKI DAVID EDWARD
US18 patents
⚠️ This page may combine multiple inventors who share the name “KOTECKI DAVID EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
17 patentsUS6136664AOct 24, 2000
Filling of high aspect ratio trench isolation
IBM88 citations98
US5789320AAug 4, 1998
Plating of noble metal electrodes for DRAM and FRAM
IBM326 citations98
US5825609AOct 20, 1998
Compound electrode stack capacitor
IBM58 citations96
US5675471AOct 7, 1997
Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity
IBM65 citations96
US6727174B1Apr 27, 2004
Method for fabricating a dual-diameter electrical conductor
IBM29 citations92
US6323127B1Nov 27, 2001
Capacitor formed with Pt electrodes having a 3D cup-like shape with roughened inner and outer surfaces
IBM21 citations92
US6015985AJan 18, 2000
Deep trench with enhanced sidewall surface area
IBM19 citations92
US5998250ADec 7, 1999
Compound electrode stack capacitor
IBM43 citations92
US5932907AAug 3, 1999
Method, materials, and structures for noble metal electrode contacts to silicon
IBM19 citations92
US5914851AJun 22, 1999
Isolated sidewall capacitor
IBM28 citations92
US5849638ADec 15, 1998
Deep trench with enhanced sidewall surface area
IBM24 citations92
US5701647ADec 30, 1997
Method for making an isolated sidewall capacitor having a compound plate electrode
IBM31 citations92
US6242321B1Jun 5, 2001
Structure and fabrication method for non-planar memory elements
IBM21 citations91
US5757612AMay 26, 1998
Structure and fabrication method for non-planar memory elements
IBM28 citations91
US6027966AFeb 22, 2000
Isolated sidewall capacitor
IBM14 citations73
US5712759AJan 27, 1998
Sidewall capacitor with L-shaped dielectric
IBM14 citations73
US6131258AOct 17, 2000
Sidewall capacitor with L-shaped dielectric
IBM5 citations62