Inventor
SAGOH SATORU
JP4 patents
Patents
4 patentsUS6090527AJul 18, 2000
Electron beam exposure mask and method of manufacturing the same and electron beam exposure method
FUJITSU LTD25 citations92
US5849437ADec 15, 1998
Electron beam exposure mask and method of manufacturing the same and electron beam exposure method
FUJITSU LTD24 citations92
US5952155ASep 14, 1999
Mask and method of creating mask as well as electron-beam exposure method and electron-beam exposure device
FUJITSU LTD10 citations73
US5824437AOct 20, 1998
Mask and method of creating mask as well as electron-beam exposure method and electron-beam exposure device
FUJITSU LTD6 citations73