Inventor

PARK JUN SIG

KR5 patents

⚠️ This page may combine multiple inventors who share the name “PARK JUN SIG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

4 patents

US5873942AFeb 23, 1999

Apparatus and method for low pressure chemical vapor deposition using multiple chambers and vacuum pumps

SAMSUNG ELECTRONICS CO LTD563 citations98

US6037272AMar 14, 2000

Apparatus and method for low pressure chemical vapor deposition using multiple chambers and vacuum pumps

SAMSUNG ELECTRONICS CO LTD17 citations92

US6214689B1Apr 10, 2001

Apparatus for manufacturing semiconductor device, method of manufacturing capacitor of semiconductor device thereby, and resultant capacitor

SAMSUNG ELECTRONICS CO LTD48 citations87

US6979368B2Dec 27, 2005

Apparatus and method for producing a semiconductor device including a byproduct control system

SAMSUNG ELECTRONICS CO LTD4 citations60

PARK JUN-SIG

1 patent

US8221045B2Jul 17, 2012

Semiconductor device manufacturing apparatus and wafer loading/unloading method thereof

PARK JUN-SIG0 citations30