Inventor
BANG WON B
US11 patents
⚠️ This page may combine multiple inventors who share the name “BANG WON B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6117244ASep 12, 2000
Deposition resistant lining for CVD chamber
APPLIED MATERIALS INC93 citations98
US7758698B2Jul 20, 2010
Dual top gas feed through distributor for high density plasma chamber
APPLIED MATERIALS INC450 citations96
US7335609B2Feb 26, 2008
Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials
APPLIED MATERIALS INC70 citations95
US6090206AJul 18, 2000
Throttle valve providing enhanced cleaning
APPLIED MATERIALS INC34 citations91
US7722719B2May 25, 2010
Gas baffle and distributor for semiconductor processing chamber
APPLIED MATERIALS INC22 citations90
US7456116B2Nov 25, 2008
Gap-fill depositions in the formation of silicon containing dielectric materials
APPLIED MATERIALS INC42 citations90
US7204888B2Apr 17, 2007
Lift pin assembly for substrate processing
APPLIED MATERIALS INC22 citations89
US7841582B2Nov 30, 2010
Variable seal pressure slit valve doors for semiconductor manufacturing equipment
APPLIED MATERIALS INC4 citations62
US7205205B2Apr 17, 2007
Ramp temperature techniques for improved mean wafer before clean
APPLIED MATERIALS INC0 citations33
MASSACHUSETTS INST TECHNOLOGY
2 patentsUS6397922B1Jun 4, 2002
Molds for casting with customized internal structure to collapse upon cooling and to facilitate control of heat transfer
MASSACHUSETTS INST TECHNOLOGY85 citations98
US6629559B2Oct 7, 2003
Molds for casting with customized internal structure to collapse upon cooling and to facilitate control of heat transfer
MASSACHUSETTS INST TECHNOLOGY43 citations92